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%0 Journal Article
%1 journals/ieicet/IkenoMKIIA13
%A Ikeno, Rimon
%A Maruyama, Takashi
%A Komatsu, Satoshi
%A Iizuka, Tetsuya
%A Ikeda, Makoto
%A Asada, Kunihiro
%D 2013
%J IEICE Trans. Fundam. Electron. Commun. Comput. Sci.
%K dblp
%N 12
%P 2458-2466
%T High-Throughput Electron Beam Direct Writing of VIA Layers by Character Projection with One-Dimensional VIA Characters.
%U http://dblp.uni-trier.de/db/journals/ieicet/ieicet96a.html#IkenoMKIIA13
%V 96-A
@article{journals/ieicet/IkenoMKIIA13,
added-at = {2020-04-11T00:00:00.000+0200},
author = {Ikeno, Rimon and Maruyama, Takashi and Komatsu, Satoshi and Iizuka, Tetsuya and Ikeda, Makoto and Asada, Kunihiro},
biburl = {https://www.bibsonomy.org/bibtex/27aa5ec65b451be8de79b85b7bd2be81e/dblp},
ee = {http://search.ieice.org/bin/summary.php?id=e96-a_12_2458},
interhash = {502a43246bd0e31f6160e6e00aa2465e},
intrahash = {7aa5ec65b451be8de79b85b7bd2be81e},
journal = {IEICE Trans. Fundam. Electron. Commun. Comput. Sci.},
keywords = {dblp},
number = 12,
pages = {2458-2466},
timestamp = {2020-04-14T11:49:30.000+0200},
title = {High-Throughput Electron Beam Direct Writing of VIA Layers by Character Projection with One-Dimensional VIA Characters.},
url = {http://dblp.uni-trier.de/db/journals/ieicet/ieicet96a.html#IkenoMKIIA13},
volume = {96-A},
year = 2013
}
