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%0 Conference Paper
%1 conf/wsc/ArishaY04
%A Arisha, Amr
%A Young, Paul
%B WSC
%D 2004
%I IEEE Computer Society
%K dblp
%P 1935-1942
%T Intelligent Simulation-Based Lot Scheduling of Photolithography Toolsets in a Wafer Fabrication Facility.
%U http://dblp.uni-trier.de/db/conf/wsc/wsc2004.html#ArishaY04
%@ 0-7803-8786-4
@inproceedings{conf/wsc/ArishaY04,
added-at = {2021-06-10T00:00:00.000+0200},
author = {Arisha, Amr and Young, Paul},
biburl = {https://www.bibsonomy.org/bibtex/23187d0839604be42fc1b0780b9428e39/dblp},
booktitle = {WSC},
crossref = {conf/wsc/2004},
ee = {http://www.informs-sim.org/wsc04papers/258.pdf},
interhash = {506a2614f1f09776d434cb8fc5f6765f},
intrahash = {3187d0839604be42fc1b0780b9428e39},
isbn = {0-7803-8786-4},
keywords = {dblp},
pages = {1935-1942},
publisher = {IEEE Computer Society},
timestamp = {2024-04-09T16:40:30.000+0200},
title = {Intelligent Simulation-Based Lot Scheduling of Photolithography Toolsets in a Wafer Fabrication Facility.},
url = {http://dblp.uni-trier.de/db/conf/wsc/wsc2004.html#ArishaY04},
year = 2004
}