%0 Conference Paper %1 conf/amcc/YiSZ05 %A Yi, Jingang %A Sang, Wei-Shu %A Zhao, E. %B ACC %D 2005 %I IEEE %K dblp %P 4231-4236 %T A run-to-run film thickness control of chemical-mechanical planarization processes. %U http://dblp.uni-trier.de/db/conf/amcc/acc2005.html#YiSZ05 %@ 0-7803-9099-7

@inproceedings{conf/amcc/YiSZ05, added-at = {2022-10-07T00:00:00.000+0200}, author = {Yi, Jingang and Sang, Wei-Shu and Zhao, E.}, biburl = {https://www.bibsonomy.org/bibtex/2ea38688b629948b2f19aa5bfd0b16411/dblp}, booktitle = {ACC}, crossref = {conf/amcc/2005}, ee = {https://doi.org/10.1109/ACC.2005.1470643}, interhash = {57726986f1b9c406c94fca40a2a76fcd}, intrahash = {ea38688b629948b2f19aa5bfd0b16411}, isbn = {0-7803-9099-7}, keywords = {dblp}, pages = {4231-4236}, publisher = {IEEE}, timestamp = {2024-04-09T13:37:40.000+0200}, title = {A run-to-run film thickness control of chemical-mechanical planarization processes.}, url = {http://dblp.uni-trier.de/db/conf/amcc/acc2005.html#YiSZ05}, year = 2005 }