%0 Thesis %1 yeh2015fabrication %A Yeh, Chia-Pin %D 2015 %K %T Fabrication and investigation of three-dimensional ferroelectric capacitors for the application of FeRAM

@phdthesis{yeh2015fabrication, added-at = {2023-12-12T23:37:56.000+0100}, author = {Yeh, Chia-Pin}, biburl = {https://www.bibsonomy.org/bibtex/2b7f36be646bf528e5dc50e0e44113b9e/admin}, dnbtitleid = {1070910929}, interhash = {58233970469b738a5a88b0cd722f2711}, intrahash = {b7f36be646bf528e5dc50e0e44113b9e}, keywords = {}, school = {Uni Magdeburg}, timestamp = {2023-12-12T23:37:56.000+0100}, title = {Fabrication and investigation of three-dimensional ferroelectric capacitors for the application of FeRAM}, year = 2015 }