%0 Conference Paper %1 conf/nems/LinCH17 %A Lin, Chih-Hung %A Chang, Shoou-Jinn %A Hsueh, Ting-Jen %B NEMS %D 2017 %I IEEE %K dblp %P 190-193 %T WO3 nanoparticle with MEMS technology improve the sensing response by HWCVD system. %U http://dblp.uni-trier.de/db/conf/nems/nems2017.html#LinCH17 %@ 978-1-5090-3059-0

@inproceedings{conf/nems/LinCH17, added-at = {2017-09-07T00:00:00.000+0200}, author = {Lin, Chih-Hung and Chang, Shoou-Jinn and Hsueh, Ting-Jen}, biburl = {https://www.bibsonomy.org/bibtex/2ed74e99cbba9b72fa420b3e8b2f77279/dblp}, booktitle = {NEMS}, crossref = {conf/nems/2017}, ee = {https://doi.org/10.1109/NEMS.2017.8017003}, interhash = {5e025436d9eb5993973305804c4a0ba1}, intrahash = {ed74e99cbba9b72fa420b3e8b2f77279}, isbn = {978-1-5090-3059-0}, keywords = {dblp}, pages = {190-193}, publisher = {IEEE}, timestamp = {2019-10-17T22:13:06.000+0200}, title = {WO3 nanoparticle with MEMS technology improve the sensing response by HWCVD system.}, url = {http://dblp.uni-trier.de/db/conf/nems/nems2017.html#LinCH17}, year = 2017 }