%0 Journal Article %1 journals/ibmrd/MichelBBDGJKRRSSSW01 %A Michel, Bruno %A Bernard, André %A Bietsch, Alexander %A Delamarche, Emmanuel %A Geissler, Matthias %A Juncker, David %A Kind, Hannes %A Renault, Jean-Philippe %A Rothuizen, Hugo E. %A Schmid, Heinz %A Schmidt-Winkel, Patrick %A Stutz, Richard %A Wolf, Heiko %D 2001 %J IBM J. Res. Dev. %K dblp %N 5 %P 697-719 %T Printing meets lithography: Soft approaches to high-resolution patterning. %U http://dblp.uni-trier.de/db/journals/ibmrd/ibmrd45.html#MichelBBDGJKRRSSSW01 %V 45

@article{journals/ibmrd/MichelBBDGJKRRSSSW01, added-at = {2020-03-13T00:00:00.000+0100}, author = {Michel, Bruno and Bernard, André and Bietsch, Alexander and Delamarche, Emmanuel and Geissler, Matthias and Juncker, David and Kind, Hannes and Renault, Jean-Philippe and Rothuizen, Hugo E. and Schmid, Heinz and Schmidt-Winkel, Patrick and Stutz, Richard and Wolf, Heiko}, biburl = {https://www.bibsonomy.org/bibtex/2b7d01ee26af5f4251682d5aeefe0b69c/dblp}, ee = {https://doi.org/10.1147/rd.455.0697}, interhash = {6b5530a88074eace78dbba0e2e3f2527}, intrahash = {b7d01ee26af5f4251682d5aeefe0b69c}, journal = {IBM J. Res. Dev.}, keywords = {dblp}, number = 5, pages = {697-719}, timestamp = {2020-03-14T11:47:19.000+0100}, title = {Printing meets lithography: Soft approaches to high-resolution patterning.}, url = {http://dblp.uni-trier.de/db/journals/ibmrd/ibmrd45.html#MichelBBDGJKRRSSSW01}, volume = 45, year = 2001 }