Evidence of chlorine ion penetration in InP/InAsP quantum well structures during dry etching processes and effects of induced-defects on the electronic and structural behaviour.
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%0 Journal Article
%1 journals/mr/LandesmanLJPLBD15
%A Landesman, Jean-Pierre
%A Levallois, Christophe
%A Jiménez, Juan
%A Pommereau, Frédéric
%A Léger, Yoan
%A Beck, Alexandre
%A Delhaye, Thomas
%A Torres, Alfredo
%A Frigeri, Cesare
%A Rhallabi, Ahmed
%D 2015
%J Microelectron. Reliab.
%K dblp
%N 9-10
%P 1750-1753
%T Evidence of chlorine ion penetration in InP/InAsP quantum well structures during dry etching processes and effects of induced-defects on the electronic and structural behaviour.
%U http://dblp.uni-trier.de/db/journals/mr/mr55.html#LandesmanLJPLBD15
%V 55
@article{journals/mr/LandesmanLJPLBD15,
added-at = {2022-10-02T00:00:00.000+0200},
author = {Landesman, Jean-Pierre and Levallois, Christophe and Jiménez, Juan and Pommereau, Frédéric and Léger, Yoan and Beck, Alexandre and Delhaye, Thomas and Torres, Alfredo and Frigeri, Cesare and Rhallabi, Ahmed},
biburl = {https://www.bibsonomy.org/bibtex/210a5a9a33252e27cb86bed87a7ef4e00/dblp},
ee = {https://doi.org/10.1016/j.microrel.2015.07.029},
interhash = {6f0491effcd4571dd58ee82a01ca398b},
intrahash = {10a5a9a33252e27cb86bed87a7ef4e00},
journal = {Microelectron. Reliab.},
keywords = {dblp},
number = {9-10},
pages = {1750-1753},
timestamp = {2024-04-09T02:49:28.000+0200},
title = {Evidence of chlorine ion penetration in InP/InAsP quantum well structures during dry etching processes and effects of induced-defects on the electronic and structural behaviour.},
url = {http://dblp.uni-trier.de/db/journals/mr/mr55.html#LandesmanLJPLBD15},
volume = 55,
year = 2015
}
