%0 Journal Article %1 journals/sensors/DuLLZSW16 %A Du, Xiaohui %A Liu, Yifang %A Li, Anlin %A Zhou, Zhou %A Sun, Daoheng %A Wang, Lingyun %D 2016 %J Sensors %K dblp %N 2 %P 158 %T Laterally Driven Resonant Pressure Sensor with Etched Silicon Dual Diaphragms and Combined Beams. %U http://dblp.uni-trier.de/db/journals/sensors/sensors16.html#DuLLZSW16 %V 16

@article{journals/sensors/DuLLZSW16, added-at = {2024-02-21T00:00:00.000+0100}, author = {Du, Xiaohui and Liu, Yifang and Li, Anlin and Zhou, Zhou and Sun, Daoheng and Wang, Lingyun}, biburl = {https://www.bibsonomy.org/bibtex/2d181f5158237e060381430ec6057d34a/dblp}, ee = {https://www.wikidata.org/entity/Q39283899}, interhash = {717c158ce33526351869c7e69efa2d66}, intrahash = {d181f5158237e060381430ec6057d34a}, journal = {Sensors}, keywords = {dblp}, number = 2, pages = 158, timestamp = {2024-04-09T04:31:40.000+0200}, title = {Laterally Driven Resonant Pressure Sensor with Etched Silicon Dual Diaphragms and Combined Beams.}, url = {http://dblp.uni-trier.de/db/journals/sensors/sensors16.html#DuLLZSW16}, volume = 16, year = 2016 }