%0 Journal Article %1 Sell02 %A Sell, K. %A Holleck, H. %A Leiste, H. %A St?ber, M. %A Ulrich, S. %A Ye, J. %D 2002 %J Diamond and Related Materials %K Annealing; Cubic Sputtering; Stress boron nitride; %N 3-6 %P 1272--1275 %R doi:10.1016/S0925-9635(01)00738-5 %T Synthesis and characterization of cubic boron nitride films: investigations of growth and annealing processes %V 11 %X Various attempts have been undertaken to reduce the compressive stress of c-BN thin films. An obvious decrease in stress was realized by post-deposition annealing up to 900 ?C, as well as by film deposition with reduced bias after c-BN nucleation. A combined deposition/in-situ annealing (at 700 ?C) multi-cycle process promotes improved film adhesion, and when implemented together with reduced ion impact during deposition, leads to additional stress relaxation for c-BN films.

@article{Sell02, abstract = {Various attempts have been undertaken to reduce the compressive stress of c-BN thin films. An obvious decrease in stress was realized by post-deposition annealing up to 900 ?C, as well as by film deposition with reduced bias after c-BN nucleation. A combined deposition/in-situ annealing (at 700 ?C) multi-cycle process promotes improved film adhesion, and when implemented together with reduced ion impact during deposition, leads to additional stress relaxation for c-BN films.}, added-at = {2009-11-05T12:01:24.000+0100}, author = {Sell, K. and Holleck, H. and Leiste, H. and St?ber, M. and Ulrich, S. and Ye, J.}, biburl = {https://www.bibsonomy.org/bibtex/2ebe704f39eb9f4dd0b816b8fc1f924eb/ghuot}, doi = {doi:10.1016/S0925-9635(01)00738-5}, file = {Shell2002.pdf:C\:\\Documents and Settings\\Guillaume\\Bureau\\ACERDE\\Articles\\BN\\Shell2002.pdf:PDF}, interhash = {75c7c180683550100fcc106a302dde54}, intrahash = {ebe704f39eb9f4dd0b816b8fc1f924eb}, journal = {Diamond and Related Materials}, keywords = {Annealing; Cubic Sputtering; Stress boron nitride;}, number = {3-6}, owner = {Guillaume}, pages = {1272--1275}, timestamp = {2009-11-05T12:01:34.000+0100}, title = {Synthesis and characterization of cubic boron nitride films: investigations of growth and annealing processes}, volume = { 11}, year = { 2002} }