%0 Conference Paper %1 WOS:000332492400034 %A Silveira, J V %A Savu, R %A Canesqui, M A %A Filho, J Mendes %A Swart, J W %A Filho, A G Souza %A Moshkalev, S A %B 2013 28TH SYMPOSIUM ON MICROELECTRONICS TECHNOLOGY AND DEVICES (SBMICRO 2013) %C 345 E 47TH ST, NEW YORK, NY 10017 USA %D 2013 %I IEEE %K Raman contact laser nanotubes; resistance} spectroscopy; treatment; {Carbon %T Improvement of the electrical contact between carbon nanotubes and metallic electrodes by laser irradiation %X In this work we used a new approach for electrical contact improvement between multi-wall carbon nanotubes and metallic electrodes by localized laser heating. The nanotubes were suspended, using the dielectrophoresis technique, over a gap of 1 mu m m width and 5 mu m m depth connecting the ends of the patterned electrodes. Subsequently, the as deposited nanotubes were directly heated, in ambient atmosphere, by a laser having a wavelength of 473nm. The Raman signal of the nanotubes, through its G band displacement, was used to determine the process temperature and this parameter was controlled by calibrating the incident power density. The changes in the nanotubes morphology were evaluated using scanning electron microscopy, Raman spectroscopy and electrical measurements. After calibration, this method was employed for improving the electrical contact between suspended multi-wall carbon nanotubes and different electrodes (W, Ti and Au). The reduction in the electrical resistance was between 80 - 99%, 80 - 95% and 10 - 90% for W, Ti and Au electrodes, respectively, resulting in contact resistivity as low as similar to 1 k Omega mu m(2.) %@ 978-1-4799-0518-8

@inproceedings{WOS:000332492400034, abstract = {In this work we used a new approach for electrical contact improvement between multi-wall carbon nanotubes and metallic electrodes by localized laser heating. The nanotubes were suspended, using the dielectrophoresis technique, over a gap of 1 mu m m width and 5 mu m m depth connecting the ends of the patterned electrodes. Subsequently, the as deposited nanotubes were directly heated, in ambient atmosphere, by a laser having a wavelength of 473nm. The Raman signal of the nanotubes, through its G band displacement, was used to determine the process temperature and this parameter was controlled by calibrating the incident power density. The changes in the nanotubes morphology were evaluated using scanning electron microscopy, Raman spectroscopy and electrical measurements. After calibration, this method was employed for improving the electrical contact between suspended multi-wall carbon nanotubes and different electrodes (W, Ti and Au). The reduction in the electrical resistance was between 80 - 99%, 80 - 95% and 10 - 90% for W, Ti and Au electrodes, respectively, resulting in contact resistivity as low as similar to 1 k Omega mu m(2.)}, added-at = {2022-05-23T20:00:14.000+0200}, address = {345 E 47TH ST, NEW YORK, NY 10017 USA}, author = {Silveira, J V and Savu, R and Canesqui, M A and Filho, J Mendes and Swart, J W and Filho, A G Souza and Moshkalev, S A}, biburl = {https://www.bibsonomy.org/bibtex/2cd624216a18ea0e0dc5f96dd6808470e/ppgfis_ufc_br}, booktitle = {2013 28TH SYMPOSIUM ON MICROELECTRONICS TECHNOLOGY AND DEVICES (SBMICRO 2013)}, interhash = {785e1486216478153efd74df4199b1ac}, intrahash = {cd624216a18ea0e0dc5f96dd6808470e}, isbn = {978-1-4799-0518-8}, keywords = {Raman contact laser nanotubes; resistance} spectroscopy; treatment; {Carbon}, note = {28th Symposium on Microelectronics Technology and Devices, Curitiba, BRAZIL, SEP 02-06, 2013}, organization = {UFPR; UTPR; UFPR, GICS; Soc Brasileira Microeletronica; Soc Brasileira Computacao; IEEE; SIGDA; CAS; Conselho Nacl Desenvolvimento Cientifico & Tecnologico; CAPES}, publisher = {IEEE}, pubstate = {published}, timestamp = {2022-05-23T20:00:14.000+0200}, title = {Improvement of the electrical contact between carbon nanotubes and metallic electrodes by laser irradiation}, tppubtype = {inproceedings}, year = 2013 }