%0 Journal Article %1 journals/mr/NelhiebelWDTB05 %A Nelhiebel, Michael %A Wissenwasser, J. %A Detzel, Thomas %A Timmerer, A. %A Bertagnolli, E. %D 2005 %J Microelectron. Reliab. %K dblp %N 9-11 %P 1355-1359 %T Hydrogen-related influence of the metallization stack on characteristics and reliability of a trench gate oxide. %U http://dblp.uni-trier.de/db/journals/mr/mr45.html#NelhiebelWDTB05 %V 45

@article{journals/mr/NelhiebelWDTB05, added-at = {2020-02-22T00:00:00.000+0100}, author = {Nelhiebel, Michael and Wissenwasser, J. and Detzel, Thomas and Timmerer, A. and Bertagnolli, E.}, biburl = {https://www.bibsonomy.org/bibtex/27d8d9923fd3663f79b70640c68718a89/dblp}, ee = {https://doi.org/10.1016/j.microrel.2005.07.020}, interhash = {86003733d17dd61eb80211442c9a55e4}, intrahash = {7d8d9923fd3663f79b70640c68718a89}, journal = {Microelectron. Reliab.}, keywords = {dblp}, number = {9-11}, pages = {1355-1359}, timestamp = {2020-02-25T13:27:55.000+0100}, title = {Hydrogen-related influence of the metallization stack on characteristics and reliability of a trench gate oxide.}, url = {http://dblp.uni-trier.de/db/journals/mr/mr45.html#NelhiebelWDTB05}, volume = 45, year = 2005 }