%0 Conference Paper %1 conf/date/PonghiranSS17 %A Ponghiran, Wachirawit %A Shim, Seongbo %A Shin, Youngsoo %B DATE %D 2017 %E Atienza, David %E Natale, Giorgio Di %I IEEE %K dblp %P 1498-1503 %T Cut mask optimization for multi-patterning directed self-assembly lithography. %U http://dblp.uni-trier.de/db/conf/date/date2017.html#PonghiranSS17 %@ 978-3-9815370-8-6

@inproceedings{conf/date/PonghiranSS17, added-at = {2017-08-14T00:00:00.000+0200}, author = {Ponghiran, Wachirawit and Shim, Seongbo and Shin, Youngsoo}, biburl = {https://www.bibsonomy.org/bibtex/206592628297f11341af5f21e9145ac5a/dblp}, booktitle = {DATE}, crossref = {conf/date/2017}, editor = {Atienza, David and Natale, Giorgio Di}, ee = {http://dl.acm.org/citation.cfm?id=3130730}, interhash = {86c44961d96d5343285193be1a4f67cf}, intrahash = {06592628297f11341af5f21e9145ac5a}, isbn = {978-3-9815370-8-6}, keywords = {dblp}, pages = {1498-1503}, publisher = {IEEE}, timestamp = {2019-10-17T15:01:48.000+0200}, title = {Cut mask optimization for multi-patterning directed self-assembly lithography.}, url = {http://dblp.uni-trier.de/db/conf/date/date2017.html#PonghiranSS17}, year = 2017 }