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%0 Journal Article
%1 journals/mr/WiatrowskiPJSSG11
%A Wiatrowski, Artur
%A Posadowski, W. M.
%A Józwiak, Grzegorz
%A Serafinczuk, Jaroslaw
%A Szeloch, R. F.
%A Gotszalk, Teodor P.
%D 2011
%J Microelectron. Reliab.
%K dblp
%N 7
%P 1203-1206
%T Standard and self-sustained magnetron sputtering deposited Cu films investigated by means of AFM and XRD.
%U http://dblp.uni-trier.de/db/journals/mr/mr51.html#WiatrowskiPJSSG11
%V 51
@article{journals/mr/WiatrowskiPJSSG11,
added-at = {2021-10-14T00:00:00.000+0200},
author = {Wiatrowski, Artur and Posadowski, W. M. and Józwiak, Grzegorz and Serafinczuk, Jaroslaw and Szeloch, R. F. and Gotszalk, Teodor P.},
biburl = {https://www.bibsonomy.org/bibtex/2c2a27793cb77d031fc97f62f27b4e96a/dblp},
ee = {https://doi.org/10.1016/j.microrel.2011.02.024},
interhash = {93482e1c991a826df4a4cf6c3a3f2d8b},
intrahash = {c2a27793cb77d031fc97f62f27b4e96a},
journal = {Microelectron. Reliab.},
keywords = {dblp},
number = 7,
pages = {1203-1206},
timestamp = {2024-04-09T02:49:28.000+0200},
title = {Standard and self-sustained magnetron sputtering deposited Cu films investigated by means of AFM and XRD.},
url = {http://dblp.uni-trier.de/db/journals/mr/mr51.html#WiatrowskiPJSSG11},
volume = 51,
year = 2011
}