%0 Journal Article %1 journals/mr/GondaJETZ07 %A Gonda, Viktor %A Jansen, Kaspar M. B. %A Ernst, Leo J. %A den Toonder, Jaap M. J. %A Zhang, G. Q. %D 2007 %J Microelectron. Reliab. %K dblp %N 2-3 %P 248-251 %T Micro-mechanical testing of SiLK by nanoindentation and substrate curvature techniques. %U http://dblp.uni-trier.de/db/journals/mr/mr47.html#GondaJETZ07 %V 47

@article{journals/mr/GondaJETZ07, added-at = {2023-09-30T00:00:00.000+0200}, author = {Gonda, Viktor and Jansen, Kaspar M. B. and Ernst, Leo J. and den Toonder, Jaap M. J. and Zhang, G. Q.}, biburl = {https://www.bibsonomy.org/bibtex/2e088270c92bac2698514d4397494610c/dblp}, ee = {https://doi.org/10.1016/j.microrel.2006.09.033}, interhash = {947ec8812d772f76fb0847d073652346}, intrahash = {e088270c92bac2698514d4397494610c}, journal = {Microelectron. Reliab.}, keywords = {dblp}, number = {2-3}, pages = {248-251}, timestamp = {2024-04-09T02:48:30.000+0200}, title = {Micro-mechanical testing of SiLK by nanoindentation and substrate curvature techniques.}, url = {http://dblp.uni-trier.de/db/journals/mr/mr47.html#GondaJETZ07}, volume = 47, year = 2007 }