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%0 Journal Article
%1 journals/sensors/LiuLLHFWT20
%A Liu, Dandan
%A Liu, Huafeng
%A Liu, Jin Quan
%A Hu, Fangjing
%A Fan, Ji
%A Wu, Wen-Jie
%A Tu, Liang Cheng
%D 2020
%J Sensors
%K dblp
%N 4
%P 1186
%T Temperature Gradient Method for Alleviating Bonding-Induced Warpage in a High-Precision Capacitive MEMS Accelerometer.
%U http://dblp.uni-trier.de/db/journals/sensors/sensors20.html#LiuLLHFWT20
%V 20
@article{journals/sensors/LiuLLHFWT20,
added-at = {2022-02-01T00:00:00.000+0100},
author = {Liu, Dandan and Liu, Huafeng and Liu, Jin Quan and Hu, Fangjing and Fan, Ji and Wu, Wen-Jie and Tu, Liang Cheng},
biburl = {https://www.bibsonomy.org/bibtex/2dcf09176d44b95cf244d85c6ea56d614/dblp},
ee = {https://www.wikidata.org/entity/Q89878557},
interhash = {98a9b8dbb2f2b5d0dd2c95110b9080d4},
intrahash = {dcf09176d44b95cf244d85c6ea56d614},
journal = {Sensors},
keywords = {dblp},
number = 4,
pages = 1186,
timestamp = {2024-04-09T04:32:52.000+0200},
title = {Temperature Gradient Method for Alleviating Bonding-Induced Warpage in a High-Precision Capacitive MEMS Accelerometer.},
url = {http://dblp.uni-trier.de/db/journals/sensors/sensors20.html#LiuLLHFWT20},
volume = 20,
year = 2020
}
