%0 Conference Paper %1 conf/itc/KuppHCM12 %A Kupp, Nathan %A Huang, Ke %A Jr., John M. Carulli %A Makris, Yiorgos %B ITC %D 2012 %I IEEE Computer Society %K dblp %P 1-8 %T Spatial estimation of wafer measurement parameters using Gaussian process models. %U http://dblp.uni-trier.de/db/conf/itc/itc2012.html#KuppHCM12 %@ 978-1-4673-1594-4

@inproceedings{conf/itc/KuppHCM12, added-at = {2023-03-23T00:00:00.000+0100}, author = {Kupp, Nathan and Huang, Ke and Jr., John M. Carulli and Makris, Yiorgos}, biburl = {https://www.bibsonomy.org/bibtex/2eeb662ea07a5281cb59d59626d41284a/dblp}, booktitle = {ITC}, crossref = {conf/itc/2012}, ee = {https://doi.ieeecomputersociety.org/10.1109/TEST.2012.6401545}, interhash = {9e5748ae466ef693cce30c4890dbeb41}, intrahash = {eeb662ea07a5281cb59d59626d41284a}, isbn = {978-1-4673-1594-4}, keywords = {dblp}, pages = {1-8}, publisher = {IEEE Computer Society}, timestamp = {2024-04-10T04:30:06.000+0200}, title = {Spatial estimation of wafer measurement parameters using Gaussian process models.}, url = {http://dblp.uni-trier.de/db/conf/itc/itc2012.html#KuppHCM12}, year = 2012 }