%0 Conference Paper %1 conf/3dic/HuangWPW15 %A Huang, Cui %A Wu, Dong %A Pan, Liyang %A Wang, Zheyao %B 3DIC %D 2015 %I IEEE %K %P TS8.7.1-TS8.7.5 %T Air-gap/SiO2 liner TSVs with improved electrical performance. %U http://dblp.uni-trier.de/db/conf/3dic/3dic2015.html#HuangWPW15 %@ 978-1-4673-9385-0

@inproceedings{conf/3dic/HuangWPW15, added-at = {2023-12-13T05:42:07.000+0100}, author = {Huang, Cui and Wu, Dong and Pan, Liyang and Wang, Zheyao}, biburl = {https://www.bibsonomy.org/bibtex/276f30b5a1869de9c048e333c0928676e/admin}, booktitle = {3DIC}, crossref = {conf/3dic/2015}, ee = {https://doi.org/10.1109/3DIC.2015.7334612}, interhash = {a59019f993d4bf06362f5b2cfacda91b}, intrahash = {76f30b5a1869de9c048e333c0928676e}, isbn = {978-1-4673-9385-0}, keywords = {}, pages = {TS8.7.1-TS8.7.5}, publisher = {IEEE}, timestamp = {2023-12-13T05:42:07.000+0100}, title = {Air-gap/SiO2 liner TSVs with improved electrical performance.}, url = {http://dblp.uni-trier.de/db/conf/3dic/3dic2015.html#HuangWPW15}, year = 2015 }