%0 Conference Paper %1 conf/sice/UmedaAGS23 %A Umeda, Shota %A Asakura, Ryoji %A Ga, Fumihiro %A Sumiya, Masahiro %B SICE %D 2023 %I IEEE %K dblp %P 1146-1151 %T Feature Extraction for Predictive Maintenance for Semiconductor Plasma Etching Equipment. %U http://dblp.uni-trier.de/db/conf/sice/sice2023.html#UmedaAGS23 %@ 978-4-9077-6480-7

@inproceedings{conf/sice/UmedaAGS23, added-at = {2024-01-25T00:00:00.000+0100}, author = {Umeda, Shota and Asakura, Ryoji and Ga, Fumihiro and Sumiya, Masahiro}, biburl = {https://www.bibsonomy.org/bibtex/2563b20d299c4d970c26cb7aadf3631be/dblp}, booktitle = {SICE}, crossref = {conf/sice/2023}, ee = {https://doi.org/10.23919/SICE59929.2023.10354229}, interhash = {acfb6efdfb60d462713ae1588fcb3f3a}, intrahash = {563b20d299c4d970c26cb7aadf3631be}, isbn = {978-4-9077-6480-7}, keywords = {dblp}, pages = {1146-1151}, publisher = {IEEE}, timestamp = {2024-04-10T00:13:29.000+0200}, title = {Feature Extraction for Predictive Maintenance for Semiconductor Plasma Etching Equipment.}, url = {http://dblp.uni-trier.de/db/conf/sice/sice2023.html#UmedaAGS23}, year = 2023 }