%0 Journal Article %1 journals/tcas/RonseJGHMWGJV09 %A Ronse, Kurt %A Jansen, Philippe %A Gronheid, Roel %A Hendrickx, Eric %A Maenhoudt, Mireille %A Wiaux, Vincent %A Goethals, Mieke %A Jonckheere, R. %A Vandenberghe, Geert %D 2009 %J IEEE Trans. Circuits Syst. I Regul. Pap. %K dblp %N 8 %P 1884-1891 %T Lithography Options for the 32 nm Half Pitch Node and Beyond. %U http://dblp.uni-trier.de/db/journals/tcas/tcasI56.html#RonseJGHMWGJV09 %V 56-I

@article{journals/tcas/RonseJGHMWGJV09, added-at = {2020-05-22T00:00:00.000+0200}, author = {Ronse, Kurt and Jansen, Philippe and Gronheid, Roel and Hendrickx, Eric and Maenhoudt, Mireille and Wiaux, Vincent and Goethals, Mieke and Jonckheere, R. and Vandenberghe, Geert}, biburl = {https://www.bibsonomy.org/bibtex/224d6ce1fcaa9160ec024d755307c0ea4/dblp}, ee = {https://doi.org/10.1109/TCSI.2009.2028417}, interhash = {ae5b924a044056c8b0f1c045b7380d28}, intrahash = {24d6ce1fcaa9160ec024d755307c0ea4}, journal = {IEEE Trans. Circuits Syst. I Regul. Pap.}, keywords = {dblp}, number = 8, pages = {1884-1891}, timestamp = {2020-05-23T12:31:25.000+0200}, title = {Lithography Options for the 32 nm Half Pitch Node and Beyond.}, url = {http://dblp.uni-trier.de/db/journals/tcas/tcasI56.html#RonseJGHMWGJV09}, volume = {56-I}, year = 2009 }