%0 Journal Article %1 journals/mr/OberhoffGTZG16 %A Oberhoff, Stefan %A Goetz, K. %A Trojan, K. %A Zoeller, M. %A Glück, Joachim %D 2016 %J Microelectron. Reliab. %K %P 656-659 %T Application of high frequency scanning acoustic microscopy for the failure analysis and reliability assessment of MEMS sensors. %U http://dblp.uni-trier.de/db/journals/mr/mr64.html#OberhoffGTZG16 %V 64

@article{journals/mr/OberhoffGTZG16, added-at = {2023-12-13T06:51:41.000+0100}, author = {Oberhoff, Stefan and Goetz, K. and Trojan, K. and Zoeller, M. and Glück, Joachim}, biburl = {https://www.bibsonomy.org/bibtex/2547558d9147aafafa2c36e0971882074/admin}, ee = {https://doi.org/10.1016/j.microrel.2016.07.108}, interhash = {b295ae604b98d19a10098e2ac8498c2b}, intrahash = {547558d9147aafafa2c36e0971882074}, journal = {Microelectron. Reliab.}, keywords = {}, pages = {656-659}, timestamp = {2023-12-13T06:51:41.000+0100}, title = {Application of high frequency scanning acoustic microscopy for the failure analysis and reliability assessment of MEMS sensors.}, url = {http://dblp.uni-trier.de/db/journals/mr/mr64.html#OberhoffGTZG16}, volume = 64, year = 2016 }