%0 Journal Article %1 journals/mr/ScholzHSLKB14 %A Scholz, Philipp %A Herfurth, Norbert %A Sadowski, Michael %A Lundquist, Ted R. %A Kerst, Uwe %A Boit, Christian %D 2014 %J Microelectron. Reliab. %K dblp %N 9-10 %P 1794-1797 %T Efficient and flexible Focused Ion Beam micromachining of Solid Immersion Lenses in various bulk semiconductor materials - An adaptive calibration algorithm. %U http://dblp.uni-trier.de/db/journals/mr/mr54.html#ScholzHSLKB14 %V 54

@article{journals/mr/ScholzHSLKB14, added-at = {2020-02-22T00:00:00.000+0100}, author = {Scholz, Philipp and Herfurth, Norbert and Sadowski, Michael and Lundquist, Ted R. and Kerst, Uwe and Boit, Christian}, biburl = {https://www.bibsonomy.org/bibtex/2561e091d0a1147e18c5ea860eb92258c/dblp}, ee = {https://doi.org/10.1016/j.microrel.2014.07.062}, interhash = {b43d79a3d6b3c84e3d65b93348848958}, intrahash = {561e091d0a1147e18c5ea860eb92258c}, journal = {Microelectron. Reliab.}, keywords = {dblp}, number = {9-10}, pages = {1794-1797}, timestamp = {2020-02-25T13:22:48.000+0100}, title = {Efficient and flexible Focused Ion Beam micromachining of Solid Immersion Lenses in various bulk semiconductor materials - An adaptive calibration algorithm.}, url = {http://dblp.uni-trier.de/db/journals/mr/mr54.html#ScholzHSLKB14}, volume = 54, year = 2014 }