%0 Journal Article %1 journals/tec/RobinOMHB03 %A Robin, Franck %A Orzati, Andrea %A Soriano, Esteban Moreno %A Homan, Otte Jakob %A Bächtold, Werner %D 2003 %J IEEE Trans. Evol. Comput. %K dblp %N 1 %P 69-82 %T Simulation and evolutionary optimization of electron-beam lithography with genetic and simplex-downhill algorithms. %U http://dblp.uni-trier.de/db/journals/tec/tec7.html#RobinOMHB03 %V 7

@article{journals/tec/RobinOMHB03, added-at = {2020-05-12T00:00:00.000+0200}, author = {Robin, Franck and Orzati, Andrea and Soriano, Esteban Moreno and Homan, Otte Jakob and Bächtold, Werner}, biburl = {https://www.bibsonomy.org/bibtex/2f9de2bc67293c46d6fbc7d9fc8a5d37b/dblp}, ee = {https://doi.org/10.1109/TEVC.2002.806166}, interhash = {b9612f67e0efcf9ceb06292a493572d0}, intrahash = {f9de2bc67293c46d6fbc7d9fc8a5d37b}, journal = {IEEE Trans. Evol. Comput.}, keywords = {dblp}, number = 1, pages = {69-82}, timestamp = {2020-05-13T11:40:28.000+0200}, title = {Simulation and evolutionary optimization of electron-beam lithography with genetic and simplex-downhill algorithms.}, url = {http://dblp.uni-trier.de/db/journals/tec/tec7.html#RobinOMHB03}, volume = 7, year = 2003 }