%0 Journal Article %1 journals/mj/UenLLC03 %A Uen, Wu-Yih %A Lan, Shan-Ming %A Liao, Sen-Mao %A Chiou, Jing-Ting %D 2003 %J Microelectron. J. %K dblp %N 2 %P 127-131 %T Generation lifetime improvement on MOS capacitor by fast neutron enhanced intrinsic gettering technique. %U http://dblp.uni-trier.de/db/journals/mj/mj34.html#UenLLC03 %V 34

@article{journals/mj/UenLLC03, added-at = {2020-02-22T00:00:00.000+0100}, author = {Uen, Wu-Yih and Lan, Shan-Ming and Liao, Sen-Mao and Chiou, Jing-Ting}, biburl = {https://www.bibsonomy.org/bibtex/20d6c15f36eda17776cb78f93f2199ee6/dblp}, ee = {https://doi.org/10.1016/S0026-2692(02)00152-0}, interhash = {c0fe173d1ae00dc0318b99020c141e32}, intrahash = {0d6c15f36eda17776cb78f93f2199ee6}, journal = {Microelectron. J.}, keywords = {dblp}, number = 2, pages = {127-131}, timestamp = {2020-02-25T12:58:29.000+0100}, title = {Generation lifetime improvement on MOS capacitor by fast neutron enhanced intrinsic gettering technique.}, url = {http://dblp.uni-trier.de/db/journals/mj/mj34.html#UenLLC03}, volume = 34, year = 2003 }