%0 Journal Article %1 journals/mr/Spengen03 %A van Spengen, W. Merlijn %D 2003 %J Microelectron. Reliab. %K dblp %N 7 %P 1049-1060 %T MEMS reliability from a failure mechanisms perspective. %U http://dblp.uni-trier.de/db/journals/mr/mr43.html#Spengen03 %V 43

@article{journals/mr/Spengen03, added-at = {2020-02-22T00:00:00.000+0100}, author = {van Spengen, W. Merlijn}, biburl = {https://www.bibsonomy.org/bibtex/2827c5d882e60f19fdf609e6a2da0bd3d/dblp}, ee = {https://doi.org/10.1016/S0026-2714(03)00119-7}, interhash = {c34889b85836cf7fbf78c89d9fc6b29c}, intrahash = {827c5d882e60f19fdf609e6a2da0bd3d}, journal = {Microelectron. Reliab.}, keywords = {dblp}, number = 7, pages = {1049-1060}, timestamp = {2020-02-25T13:22:12.000+0100}, title = {MEMS reliability from a failure mechanisms perspective.}, url = {http://dblp.uni-trier.de/db/journals/mr/mr43.html#Spengen03}, volume = 43, year = 2003 }