%0 Journal Article %1 journals/candie/MadathilNMK18 %A Madathil, Sreenath Chalil %A Nambiar, Siddhartha %A Mason, Scott J. %A Kurz, Mary E. %D 2018 %J Comput. Ind. Eng. %K dblp %P 177-188 %T On scheduling a photolithography area containing cluster tools. %U http://dblp.uni-trier.de/db/journals/candie/candie121.html#MadathilNMK18 %V 121

@article{journals/candie/MadathilNMK18, added-at = {2023-06-26T00:00:00.000+0200}, author = {Madathil, Sreenath Chalil and Nambiar, Siddhartha and Mason, Scott J. and Kurz, Mary E.}, biburl = {https://www.bibsonomy.org/bibtex/2ab0861f90b8c6bf546a28ba7fe46836a/dblp}, ee = {https://doi.org/10.1016/j.cie.2018.05.036}, interhash = {c8e55d567c5756b17d0900acd2301c3e}, intrahash = {ab0861f90b8c6bf546a28ba7fe46836a}, journal = {Comput. Ind. Eng.}, keywords = {dblp}, pages = {177-188}, timestamp = {2024-04-09T04:42:14.000+0200}, title = {On scheduling a photolithography area containing cluster tools.}, url = {http://dblp.uni-trier.de/db/journals/candie/candie121.html#MadathilNMK18}, volume = 121, year = 2018 }