Abstract
We introduce a high sensitivity (1J/m2) scanning microcalorimeter
that can be used at high heating rates (104 �C/s). The system is
designed using ultrathin SiN membranes that serve as a low thermal
mass mechanical support structure for the calorimeter. Calorimetry
measurements of the system are accomplished via resistive heating
techniques applied to a thin film Ni heating element that also serves
as a thermometer. A current pulse through the Ni heater generates
heat in the sample via Joule heating. The voltage and current characteristics
of the heater were measured to obtain real-time values of the temperature
and the heat delivered to the system. This technique shows potential
for measuring irreversible heat of reactions for processes at interfaces
and surfaces. The method is demonstrated by measuring the heat of
fusion for various amounts of thermally evaporated Sn ranging from
50 to 1000 �.
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