%0 Thesis %1 phd/ndltd/Walsh04 %A Walsh, Michael E. %D 2004 %K dblp %T On the design of lithographic interferometers and their application.

@phdthesis{phd/ndltd/Walsh04, added-at = {2022-05-04T00:00:00.000+0200}, author = {Walsh, Michael E.}, biburl = {https://www.bibsonomy.org/bibtex/213889d9b3a8670f6a14bf52c137d86bf/dblp}, ee = {https://hdl.handle.net/1721.1/28741}, interhash = {deb461f59d4c92ddc973078e90123031}, intrahash = {13889d9b3a8670f6a14bf52c137d86bf}, keywords = {dblp}, note = {ndltd.org (oai:dspace.mit.edu:1721.1/28741)}, school = {Massachusetts Institute of Technology, Cambridge, MA, USA}, timestamp = {2024-04-09T08:10:06.000+0200}, title = {On the design of lithographic interferometers and their application.}, year = 2004 }