%0 Journal Article %1 journals/candie/LuoYHZP15 %A Luo, Ming %A Yan, Heng-Chao %A Hu, Bin %A Zhou, Junhong %A Pang, Chee Khiang %D 2015 %J Comput. Ind. Eng. %K dblp %P 414-422 %T A data-driven two-stage maintenance framework for degradation prediction in semiconductor manufacturing industries. %U http://dblp.uni-trier.de/db/journals/candie/candie85.html#LuoYHZP15 %V 85

@article{journals/candie/LuoYHZP15, added-at = {2020-02-20T00:00:00.000+0100}, author = {Luo, Ming and Yan, Heng-Chao and Hu, Bin and Zhou, Junhong and Pang, Chee Khiang}, biburl = {https://www.bibsonomy.org/bibtex/2a8d709a414c8f0810e83a6581771f0af/dblp}, ee = {https://doi.org/10.1016/j.cie.2015.04.008}, interhash = {e851f2b8723cc6678f20d27f39bebd27}, intrahash = {a8d709a414c8f0810e83a6581771f0af}, journal = {Comput. Ind. Eng.}, keywords = {dblp}, pages = {414-422}, timestamp = {2020-02-21T12:55:56.000+0100}, title = {A data-driven two-stage maintenance framework for degradation prediction in semiconductor manufacturing industries.}, url = {http://dblp.uni-trier.de/db/journals/candie/candie85.html#LuoYHZP15}, volume = 85, year = 2015 }