%0 Journal Article %1 journals/mr/CharavelRMGBVDMB10 %A Charavel, R. %A Roig, Jaume %A Mouhoubi, S. %A Gassot, P. %A Bauwens, Filip %A Vanmeerbeek, Piet %A Desoete, B. %A Moens, Peter %A Backer, Eddy De %D 2010 %J Microelectron. Reliab. %K dblp %N 9-11 %P 1758-1762 %T Next generation of Deep Trench Isolation for Smart Power technologies with 120 V high-voltage devices. %U http://dblp.uni-trier.de/db/journals/mr/mr50.html#CharavelRMGBVDMB10 %V 50

@article{journals/mr/CharavelRMGBVDMB10, added-at = {2020-02-22T00:00:00.000+0100}, author = {Charavel, R. and Roig, Jaume and Mouhoubi, S. and Gassot, P. and Bauwens, Filip and Vanmeerbeek, Piet and Desoete, B. and Moens, Peter and Backer, Eddy De}, biburl = {https://www.bibsonomy.org/bibtex/2e43bce1d28198d30122c3261e10d3410/dblp}, ee = {https://doi.org/10.1016/j.microrel.2010.07.117}, interhash = {e8a32fa0411e2fee502d670ca5681b1e}, intrahash = {e43bce1d28198d30122c3261e10d3410}, journal = {Microelectron. Reliab.}, keywords = {dblp}, number = {9-11}, pages = {1758-1762}, timestamp = {2020-02-25T13:23:10.000+0100}, title = {Next generation of Deep Trench Isolation for Smart Power technologies with 120 V high-voltage devices.}, url = {http://dblp.uni-trier.de/db/journals/mr/mr50.html#CharavelRMGBVDMB10}, volume = 50, year = 2010 }