%0 Conference Paper %1 conf/3dic/WindrichS13 %A Windrich, Frank %A Schenke, Andreas %B 3DIC %D 2013 %I IEEE %K dblp %P 1-6 %T Front to backside alignment for TSV based 3D integration. %U http://dblp.uni-trier.de/db/conf/3dic/3dic2013.html#WindrichS13 %@ 978-1-4673-6484-3

@inproceedings{conf/3dic/WindrichS13, added-at = {2017-06-15T00:00:00.000+0200}, author = {Windrich, Frank and Schenke, Andreas}, biburl = {https://www.bibsonomy.org/bibtex/262c4ceeca8e220e8501ca9d31a17bc6f/dblp}, booktitle = {3DIC}, crossref = {conf/3dic/2013}, ee = {https://doi.org/10.1109/3DIC.2013.6702371}, interhash = {effa3df54d16b1020c4a9512ae018aaa}, intrahash = {62c4ceeca8e220e8501ca9d31a17bc6f}, isbn = {978-1-4673-6484-3}, keywords = {dblp}, pages = {1-6}, publisher = {IEEE}, timestamp = {2019-10-17T15:31:37.000+0200}, title = {Front to backside alignment for TSV based 3D integration.}, url = {http://dblp.uni-trier.de/db/conf/3dic/3dic2013.html#WindrichS13}, year = 2013 }