%0 Conference Paper %1 conf/dac/ChangLF15 %A Chang, Yao-Wen %A Liu, Ru-Gun %A Fang, Shao-Yun %B DAC %D 2015 %I ACM %K dblp %P 198:1-198:6 %T EUV and e-beam manufacturability: challenges and solutions. %U http://dblp.uni-trier.de/db/conf/dac/dac2015.html#ChangLF15 %@ 978-1-4503-3520-1

@inproceedings{conf/dac/ChangLF15, added-at = {2018-11-06T00:00:00.000+0100}, author = {Chang, Yao-Wen and Liu, Ru-Gun and Fang, Shao-Yun}, biburl = {https://www.bibsonomy.org/bibtex/29426095e0e4395ed169c5c2872a5004b/dblp}, booktitle = {DAC}, crossref = {conf/dac/2015}, ee = {https://doi.org/10.1145/2744769.2747925}, interhash = {f147699ec8f4d4afaeffc69fabf2f5c4}, intrahash = {9426095e0e4395ed169c5c2872a5004b}, isbn = {978-1-4503-3520-1}, keywords = {dblp}, pages = {198:1-198:6}, publisher = {ACM}, timestamp = {2018-11-07T15:14:15.000+0100}, title = {EUV and e-beam manufacturability: challenges and solutions.}, url = {http://dblp.uni-trier.de/db/conf/dac/dac2015.html#ChangLF15}, year = 2015 }