%0 Thesis %1 meier2001flexible %A Meier, Sven %D 2001 %K %T Flexible PECVD-Technologie für kontaktmechanisch beanspruchte a-C:H-Schichten

@phdthesis{meier2001flexible, added-at = {2023-12-14T15:56:21.000+0100}, author = {Meier, Sven}, biburl = {https://www.bibsonomy.org/bibtex/2868418fb252bd83504b831130d3e0180/admin}, dnbtitleid = {995688206}, interhash = {f16de08f3e9b10f7986906bdc14a2703}, intrahash = {868418fb252bd83504b831130d3e0180}, keywords = {}, school = {Uni Braunschweig}, timestamp = {2023-12-14T15:56:21.000+0100}, title = {Flexible PECVD-Technologie für kontaktmechanisch beanspruchte a-C:H-Schichten}, year = 2001 }