%0 Conference Paper %1 conf/wsc/ByrneHK07 %A Byrne, Peter J. %A Heavey, Cathal %A Kabak, Kamil Erkan %B WSC %D 2007 %E Henderson, Shane G. %E Biller, Bahar %E Hsieh, Ming-Hua %E Shortle, John %E Tew, Jeffrey D. %E Barton, Russell R. %I WSC %K dblp %P 1761-1767 %T An analysis of tool capabilities in the photolithography area of an ASIC fab. %U http://dblp.uni-trier.de/db/conf/wsc/wsc2007.html#ByrneHK07 %@ 1-4244-1306-0

@inproceedings{conf/wsc/ByrneHK07, added-at = {2021-06-10T00:00:00.000+0200}, author = {Byrne, Peter J. and Heavey, Cathal and Kabak, Kamil Erkan}, biburl = {https://www.bibsonomy.org/bibtex/2c5cd2ec38849416f776ce772a2974a42/dblp}, booktitle = {WSC}, crossref = {conf/wsc/2007}, editor = {Henderson, Shane G. and Biller, Bahar and Hsieh, Ming-Hua and Shortle, John and Tew, Jeffrey D. and Barton, Russell R.}, ee = {http://dl.acm.org/citation.cfm?id=1351858}, interhash = {f59ceb902b1febae591de6b469363a08}, intrahash = {c5cd2ec38849416f776ce772a2974a42}, isbn = {1-4244-1306-0}, keywords = {dblp}, pages = {1761-1767}, publisher = {WSC}, timestamp = {2024-04-09T16:43:29.000+0200}, title = {An analysis of tool capabilities in the photolithography area of an ASIC fab.}, url = {http://dblp.uni-trier.de/db/conf/wsc/wsc2007.html#ByrneHK07}, year = 2007 }