%0 Conference Paper %1 conf/ieeesensors/LeclerMF19 %A Lecler, Simon %A Marconot, Olivier %A Fréchette, Luc G. %B IEEE SENSORS %D 2019 %I IEEE %K dblp %P 1-4 %T SiO2/SiN membranes as MEMS Pirani gauges for wide pressure measurement range. %U http://dblp.uni-trier.de/db/conf/ieeesensors/ieeesensors2019.html#LeclerMF19 %@ 978-1-7281-1634-1

@inproceedings{conf/ieeesensors/LeclerMF19, added-at = {2023-09-08T00:00:00.000+0200}, author = {Lecler, Simon and Marconot, Olivier and Fréchette, Luc G.}, biburl = {https://www.bibsonomy.org/bibtex/2bbbd5c1c01d604e76bcdde82f41b780a/dblp}, booktitle = {IEEE SENSORS}, crossref = {conf/ieeesensors/2019}, ee = {https://doi.org/10.1109/SENSORS43011.2019.8956864}, interhash = {f6eecdf159d7f7d30d35f7e18e1f57a5}, intrahash = {bbbd5c1c01d604e76bcdde82f41b780a}, isbn = {978-1-7281-1634-1}, keywords = {dblp}, pages = {1-4}, publisher = {IEEE}, timestamp = {2024-04-09T12:37:34.000+0200}, title = {SiO2/SiN membranes as MEMS Pirani gauges for wide pressure measurement range.}, url = {http://dblp.uni-trier.de/db/conf/ieeesensors/ieeesensors2019.html#LeclerMF19}, year = 2019 }