%0 Journal Article %1 journals/ibmrd/GusevNF06 %A Gusev, Evgeni P. %A Narayanan, Vijay %A Frank, Martin M. %D 2006 %J IBM J. Res. Dev. %K dblp %N 4-5 %P 387-410 %T Advanced high-k dielectric stacks with polySi and metal gates: Recent progress and current challenges. %U http://dblp.uni-trier.de/db/journals/ibmrd/ibmrd50.html#GusevNF06 %V 50

@article{journals/ibmrd/GusevNF06, added-at = {2023-09-30T00:00:00.000+0200}, author = {Gusev, Evgeni P. and Narayanan, Vijay and Frank, Martin M.}, biburl = {https://www.bibsonomy.org/bibtex/20f94033a6b4facb2e45242a81bf760b2/dblp}, ee = {https://doi.org/10.1147/rd.504.0387}, interhash = {faf4dc190c19f24f9fb77084225a6477}, intrahash = {0f94033a6b4facb2e45242a81bf760b2}, journal = {IBM J. Res. Dev.}, keywords = {dblp}, number = {4-5}, pages = {387-410}, timestamp = {2024-04-08T16:06:51.000+0200}, title = {Advanced high-k dielectric stacks with polySi and metal gates: Recent progress and current challenges.}, url = {http://dblp.uni-trier.de/db/journals/ibmrd/ibmrd50.html#GusevNF06}, volume = 50, year = 2006 }