%0 Journal Article %1 Back2013 %A Back, F. %A Bockmeyer, M. %A Rudigier-Voigt, E. %A Löbmann, P. %D 2013 %J Journal of Sol-Gel Science and Technology %K myown ploebmann %N 1 %P 73-83 %R 10.1007/s10971-013-2969-x %T Hybrid polymer sol–gel material for UV-nanoimprint: microstructure and thermal densification %U http://dx.doi.org/10.1007/s10971-013-2969-x %V 66 %X Hybrid polymer solutions suitable for UV-nanoimprint were synthesized by combination of an alkoxysilane binder mixture with silica nanoparticles. Hydrolysis and condensation reactions were monitored by NMR and viscosity measurements. Thereby long-term stable systems were produced as a prerequisite for industrial application. Dip-coating of glass substrates and subsequent UV-curing yielded thin films. Their thermal densification and microstructural evolution resulted in pure glassy porous coatings, which were in detail characterized by N2-sorption measurements and ellipsometric porosimetry. Results emphasize the importance of the binder-particle interaction within these materials that are destined for the fabrication of microstructured surfaces by cost efficient and industrially feasible UV-based soft lithography. Structured glassy layers with high inorganic content show thermal stability up to >500 °C and have a high structure accuracy >85 %.

@article{Back2013, abstract = {Hybrid polymer solutions suitable for UV-nanoimprint were synthesized by combination of an alkoxysilane binder mixture with silica nanoparticles. Hydrolysis and condensation reactions were monitored by NMR and viscosity measurements. Thereby long-term stable systems were produced as a prerequisite for industrial application. Dip-coating of glass substrates and subsequent UV-curing yielded thin films. Their thermal densification and microstructural evolution resulted in pure glassy porous coatings, which were in detail characterized by N2-sorption measurements and ellipsometric porosimetry. Results emphasize the importance of the binder-particle interaction within these materials that are destined for the fabrication of microstructured surfaces by cost efficient and industrially feasible UV-based soft lithography. Structured glassy layers with high inorganic content show thermal stability up to >500 °C and have a high structure accuracy >85 %.}, added-at = {2014-07-14T20:22:49.000+0200}, author = {Back, F. and Bockmeyer, M. and Rudigier-Voigt, E. and Löbmann, P.}, biburl = {https://www.bibsonomy.org/bibtex/282d849dfadecb4eca7cd9711b93ee7e4/lctm}, doi = {10.1007/s10971-013-2969-x}, interhash = {fb94f69f649545281f2ba0a51a05a835}, intrahash = {82d849dfadecb4eca7cd9711b93ee7e4}, journal = {Journal of Sol-Gel Science and Technology}, keywords = {myown ploebmann}, number = 1, owner = {lctm}, pages = {73-83}, timestamp = {2014-07-14T20:22:49.000+0200}, title = {Hybrid polymer sol–gel material for UV-nanoimprint: microstructure and thermal densification}, url = {http://dx.doi.org/10.1007/s10971-013-2969-x}, volume = 66, year = 2013 }