%0 Conference Paper %1 conf/icnsc/QiaoWZD13 %A Qiao, Yan %A Wu, Naiqi %A Zhou, MengChu %A Dai, Qingyun %B ICNSC %D 2013 %I IEEE %K dblp %P 252-257 %T Petri net-based scheduling analysis of dual-arm cluster tools subject to wafer revisiting and residency time constraints. %U http://dblp.uni-trier.de/db/conf/icnsc/icnsc2013.html#QiaoWZD13 %@ 978-1-4673-5198-0

@inproceedings{conf/icnsc/QiaoWZD13, added-at = {2017-04-25T00:00:00.000+0200}, author = {Qiao, Yan and Wu, Naiqi and Zhou, MengChu and Dai, Qingyun}, biburl = {https://www.bibsonomy.org/bibtex/27e2f474a15fc63480f05d62ab932d382/dblp}, booktitle = {ICNSC}, crossref = {conf/icnsc/2013}, ee = {http://dx.doi.org/10.1109/ICNSC.2013.6548746}, interhash = {fc063a102f1f3253bdf92500ae934448}, intrahash = {7e2f474a15fc63480f05d62ab932d382}, isbn = {978-1-4673-5198-0}, keywords = {dblp}, pages = {252-257}, publisher = {IEEE}, timestamp = {2017-04-26T11:39:56.000+0200}, title = {Petri net-based scheduling analysis of dual-arm cluster tools subject to wafer revisiting and residency time constraints.}, url = {http://dblp.uni-trier.de/db/conf/icnsc/icnsc2013.html#QiaoWZD13}, year = 2013 }