%0 Journal Article %1 journals/mr/ItoNHAKISSH02 %A Ito, Shinya %A Namba, Hiroaki %A Hirata, Tsuyoshi %A Ando, Koichi %A Koyama, Shin %A Ikezawa, Nobuyuki %A Suzuki, Tatsuya %A Saitoh, Takehiro %A Horiuchi, Tadahiko %D 2002 %J Microelectron. Reliab. %K dblp %N 2 %P 201-209 %T Effect of mechanical stress induced by etch-stop nitride: impact on deep-submicron transistor performance. %U http://dblp.uni-trier.de/db/journals/mr/mr42.html#ItoNHAKISSH02 %V 42

@article{journals/mr/ItoNHAKISSH02, added-at = {2020-02-22T00:00:00.000+0100}, author = {Ito, Shinya and Namba, Hiroaki and Hirata, Tsuyoshi and Ando, Koichi and Koyama, Shin and Ikezawa, Nobuyuki and Suzuki, Tatsuya and Saitoh, Takehiro and Horiuchi, Tadahiko}, biburl = {https://www.bibsonomy.org/bibtex/2941187dc20a9285f990a81e081f7044a/dblp}, ee = {https://doi.org/10.1016/S0026-2714(01)00238-4}, interhash = {7aa3bd98a921e91f969d902ffd709e28}, intrahash = {941187dc20a9285f990a81e081f7044a}, journal = {Microelectron. Reliab.}, keywords = {dblp}, number = 2, pages = {201-209}, timestamp = {2020-02-25T13:28:18.000+0100}, title = {Effect of mechanical stress induced by etch-stop nitride: impact on deep-submicron transistor performance.}, url = {http://dblp.uni-trier.de/db/journals/mr/mr42.html#ItoNHAKISSH02}, volume = 42, year = 2002 }