%0 Conference Paper %1 conf/3dic/HalderWPMMBSB11 %A Halder, Sandip %A Wolf, Ingrid De %A Phommahaxay, Alain %A Miller, Andy %A Maenhoudt, Mireille %A Beyer, Gerald %A Swinnen, Bart %A Beyne, Eric %B 3DIC %D 2011 %E Koyanagi, Mitsumasa %E Kada, Morihiro %I IEEE %K dblp %P 1-4 %T In-line metrology and inspection for process control during 3D stacking of IC's. %U http://dblp.uni-trier.de/db/conf/3dic/3dic2011.html#HalderWPMMBSB11 %@ 978-1-4673-2189-1

@inproceedings{conf/3dic/HalderWPMMBSB11, added-at = {2022-10-02T00:00:00.000+0200}, author = {Halder, Sandip and Wolf, Ingrid De and Phommahaxay, Alain and Miller, Andy and Maenhoudt, Mireille and Beyer, Gerald and Swinnen, Bart and Beyne, Eric}, biburl = {https://www.bibsonomy.org/bibtex/2f742788cbdb2caa9eb69093e3cd0c52c/dblp}, booktitle = {3DIC}, crossref = {conf/3dic/2011}, editor = {Koyanagi, Mitsumasa and Kada, Morihiro}, ee = {https://doi.org/10.1109/3DIC.2012.6263006}, interhash = {a4e540ed4db96b5d96286d466130c544}, intrahash = {f742788cbdb2caa9eb69093e3cd0c52c}, isbn = {978-1-4673-2189-1}, keywords = {dblp}, pages = {1-4}, publisher = {IEEE}, timestamp = {2024-04-10T12:11:22.000+0200}, title = {In-line metrology and inspection for process control during 3D stacking of IC's.}, url = {http://dblp.uni-trier.de/db/conf/3dic/3dic2011.html#HalderWPMMBSB11}, year = 2011 }