%0 Conference Paper %1 conf/asicon/ZhangSWZ13 %A Zhang, Chun-Min %A Sun, Qing-Qing %A Wang, Peng-Fei %A Zhang, David Wei %B ASICON %D 2013 %I IEEE %K dblp %P 1-4 %T PEALD Ru/RuOx films for ULSI applications and its transition control between metal and metal oxide. %U http://dblp.uni-trier.de/db/conf/asicon/asicon2013.html#ZhangSWZ13 %@ 978-1-4673-6415-7

@inproceedings{conf/asicon/ZhangSWZ13, added-at = {2015-02-23T00:00:00.000+0100}, author = {Zhang, Chun-Min and Sun, Qing-Qing and Wang, Peng-Fei and Zhang, David Wei}, biburl = {https://www.bibsonomy.org/bibtex/282b74e087e5330982a37af19ecd381dd/dblp}, booktitle = {ASICON}, crossref = {conf/asicon/2013}, ee = {http://dx.doi.org/10.1109/ASICON.2013.6811922}, interhash = {ca4ad9359381a6d850b6dedea7d2486d}, intrahash = {82b74e087e5330982a37af19ecd381dd}, isbn = {978-1-4673-6415-7}, keywords = {dblp}, pages = {1-4}, publisher = {IEEE}, timestamp = {2015-06-19T16:17:58.000+0200}, title = {PEALD Ru/RuOx films for ULSI applications and its transition control between metal and metal oxide.}, url = {http://dblp.uni-trier.de/db/conf/asicon/asicon2013.html#ZhangSWZ13}, year = 2013 }