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%0 Conference Paper
%1 conf/aspdac/ChenKCCL11
%A Chen, Jack J. H.
%A Krecinic, Faruk
%A Chen, Jen-Hom
%A Chen, Raymond P. S.
%A Lin, Burn J.
%B ASP-DAC
%D 2011
%I IEEE
%K dblp
%P 403-404
%T Future electron-beam lithography and implications on design and CAD tools.
%U http://dblp.uni-trier.de/db/conf/aspdac/aspdac2011.html#ChenKCCL11
%@ 978-1-4244-7516-2
@inproceedings{conf/aspdac/ChenKCCL11,
added-at = {2017-05-26T00:00:00.000+0200},
author = {Chen, Jack J. H. and Krecinic, Faruk and Chen, Jen-Hom and Chen, Raymond P. S. and Lin, Burn J.},
biburl = {https://www.bibsonomy.org/bibtex/2b0f6cc3396c979f1c02b08ef23593ec9/dblp},
booktitle = {ASP-DAC},
crossref = {conf/aspdac/2011},
ee = {http://dl.acm.org/citation.cfm?id=1950900},
interhash = {fa8acddd08ebb9c57837bae3f55c8ccf},
intrahash = {b0f6cc3396c979f1c02b08ef23593ec9},
isbn = {978-1-4244-7516-2},
keywords = {dblp},
pages = {403-404},
publisher = {IEEE},
timestamp = {2019-10-17T16:43:25.000+0200},
title = {Future electron-beam lithography and implications on design and CAD tools.},
url = {http://dblp.uni-trier.de/db/conf/aspdac/aspdac2011.html#ChenKCCL11},
year = 2011
}