%0 Conference Paper %1 conf/aspdac/ChenKCCL11 %A Chen, Jack J. H. %A Krecinic, Faruk %A Chen, Jen-Hom %A Chen, Raymond P. S. %A Lin, Burn J. %B ASP-DAC %D 2011 %I IEEE %K dblp %P 403-404 %T Future electron-beam lithography and implications on design and CAD tools. %U http://dblp.uni-trier.de/db/conf/aspdac/aspdac2011.html#ChenKCCL11 %@ 978-1-4244-7516-2

@inproceedings{conf/aspdac/ChenKCCL11, added-at = {2017-05-26T00:00:00.000+0200}, author = {Chen, Jack J. H. and Krecinic, Faruk and Chen, Jen-Hom and Chen, Raymond P. S. and Lin, Burn J.}, biburl = {https://www.bibsonomy.org/bibtex/2b0f6cc3396c979f1c02b08ef23593ec9/dblp}, booktitle = {ASP-DAC}, crossref = {conf/aspdac/2011}, ee = {http://dl.acm.org/citation.cfm?id=1950900}, interhash = {fa8acddd08ebb9c57837bae3f55c8ccf}, intrahash = {b0f6cc3396c979f1c02b08ef23593ec9}, isbn = {978-1-4244-7516-2}, keywords = {dblp}, pages = {403-404}, publisher = {IEEE}, timestamp = {2019-10-17T16:43:25.000+0200}, title = {Future electron-beam lithography and implications on design and CAD tools.}, url = {http://dblp.uni-trier.de/db/conf/aspdac/aspdac2011.html#ChenKCCL11}, year = 2011 }