We analyzed possibility to increase density of elements of integrated circuits. We illustrate the possibility
by example of manufacturing of a circuit XOR. Framework the paper we consider a heterostructure which
includes into itself a substrate and an epitaxial layer with specific configuration. Several required areas of
the heterostructure have been doped by diffusion and/or ion implantation. After that we consider optimized
annealing of dopant and/or radiation defects.
%0 Journal Article
%1 pankratov2016optimization
%A Pankratov, E.L.
%D 2016
%J International Journal of Recent advances in Physics (IJRAP)
%K physics
%N 1
%P 1-18
%R 10.14810/ijrap.2016.5101
%T OPTIMIZATION OF MANUFACTURING OF CIRCUITS
XOR TO DECREASE THEIR DIMENSIONS
%U http://wireilla.com/physics/ijrap/index.html
%V 5
%X We analyzed possibility to increase density of elements of integrated circuits. We illustrate the possibility
by example of manufacturing of a circuit XOR. Framework the paper we consider a heterostructure which
includes into itself a substrate and an epitaxial layer with specific configuration. Several required areas of
the heterostructure have been doped by diffusion and/or ion implantation. After that we consider optimized
annealing of dopant and/or radiation defects.
@article{pankratov2016optimization,
abstract = {We analyzed possibility to increase density of elements of integrated circuits. We illustrate the possibility
by example of manufacturing of a circuit XOR. Framework the paper we consider a heterostructure which
includes into itself a substrate and an epitaxial layer with specific configuration. Several required areas of
the heterostructure have been doped by diffusion and/or ion implantation. After that we consider optimized
annealing of dopant and/or radiation defects. },
added-at = {2018-03-15T06:14:21.000+0100},
author = {Pankratov, E.L.},
biburl = {https://www.bibsonomy.org/bibtex/27f799f4f293d438b3510dbf37abc23f6/johnkenadi1985.},
doi = {10.14810/ijrap.2016.5101},
interhash = {fd4a1b032ba76d8196600fe5de29f1b7},
intrahash = {7f799f4f293d438b3510dbf37abc23f6},
journal = {International Journal of Recent advances in Physics (IJRAP)},
keywords = {physics},
month = {2016/02},
number = 1,
pages = {1-18},
timestamp = {2018-03-15T06:14:21.000+0100},
title = {OPTIMIZATION OF MANUFACTURING OF CIRCUITS
XOR TO DECREASE THEIR DIMENSIONS
},
url = {http://wireilla.com/physics/ijrap/index.html},
volume = 5,
year = 2016
}