@gdmcbain

Electrothermal responses of lineshape microstructures

. Sensors and Actuators A: Physical, 55 (1): 35--41 (Jul 15, 1996)
DOI: 10.1016/s0924-4247(96)01247-2

Abstract

Electrothermal responses of attached and suspended lineshape microstructures fabricated by surface micromachining are investigated. A three-dimensional electrothermal model has been established. This model is based on an axial, one-dimensional electrothermal analysis and a heat-conduction shape factor that represents heat transfer perpendicular to the axial direction. Experimental devices have been built by the surface-micromachining process and a 2 μm gap is constructed for suspended microstructures. Electrical power is passed through these microstructures to characterize the electrothermal responses. Bubble-formation experiments which use local electrical heating to generate micro thermal bubbles in a working liquid have been tested by using these microstructures and the experimental results are consistent with the theoretical model.

Links and resources

Tags