Electrothermal responses of attached and suspended lineshape microstructures fabricated by surface micromachining are investigated. A three-dimensional electrothermal model has been established. This model is based on an axial, one-dimensional electrothermal analysis and a heat-conduction shape factor that represents heat transfer perpendicular to the axial direction. Experimental devices have been built by the surface-micromachining process and a 2 μm gap is constructed for suspended microstructures. Electrical power is passed through these microstructures to characterize the electrothermal responses. Bubble-formation experiments which use local electrical heating to generate micro thermal bubbles in a working liquid have been tested by using these microstructures and the experimental results are consistent with the theoretical model.
%0 Journal Article
%1 citeulike:4005757
%A Lin, L.
%D 1996
%J Sensors and Actuators A: Physical
%K 78a55-optics-electromagnetic-theory-technical-applications
%N 1
%P 35--41
%R 10.1016/s0924-4247(96)01247-2
%T Electrothermal responses of lineshape microstructures
%U http://dx.doi.org/10.1016/s0924-4247(96)01247-2
%V 55
%X Electrothermal responses of attached and suspended lineshape microstructures fabricated by surface micromachining are investigated. A three-dimensional electrothermal model has been established. This model is based on an axial, one-dimensional electrothermal analysis and a heat-conduction shape factor that represents heat transfer perpendicular to the axial direction. Experimental devices have been built by the surface-micromachining process and a 2 μm gap is constructed for suspended microstructures. Electrical power is passed through these microstructures to characterize the electrothermal responses. Bubble-formation experiments which use local electrical heating to generate micro thermal bubbles in a working liquid have been tested by using these microstructures and the experimental results are consistent with the theoretical model.
@article{citeulike:4005757,
abstract = {{Electrothermal responses of attached and suspended lineshape microstructures fabricated by surface micromachining are investigated. A three-dimensional electrothermal model has been established. This model is based on an axial, one-dimensional electrothermal analysis and a heat-conduction shape factor that represents heat transfer perpendicular to the axial direction. Experimental devices have been built by the surface-micromachining process and a 2 μm gap is constructed for suspended microstructures. Electrical power is passed through these microstructures to characterize the electrothermal responses. Bubble-formation experiments which use local electrical heating to generate micro thermal bubbles in a working liquid have been tested by using these microstructures and the experimental results are consistent with the theoretical model.}},
added-at = {2017-06-29T07:13:07.000+0200},
author = {Lin, L.},
biburl = {https://www.bibsonomy.org/bibtex/2ae53685b2e90ff4a0010038f06defcb5/gdmcbain},
citeulike-article-id = {4005757},
citeulike-linkout-0 = {http://dx.doi.org/10.1016/s0924-4247(96)01247-2},
comment = {(private-note)Holdings: pers.},
day = 15,
doi = {10.1016/s0924-4247(96)01247-2},
interhash = {f4f971364d47ed558e75f12ceca56e92},
intrahash = {ae53685b2e90ff4a0010038f06defcb5},
issn = {09244247},
journal = {Sensors and Actuators A: Physical},
keywords = {78a55-optics-electromagnetic-theory-technical-applications},
month = jul,
number = 1,
pages = {35--41},
posted-at = {2009-02-04 03:58:30},
priority = {1},
timestamp = {2017-06-29T07:13:07.000+0200},
title = {{Electrothermal responses of lineshape microstructures}},
url = {http://dx.doi.org/10.1016/s0924-4247(96)01247-2},
volume = 55,
year = 1996
}