%0 Conference Paper %1 conf/essderc/RawatBMVWHRL21 %A Rawat, Amita %A Bhuwalka, Krishna K. %A Matagne, Philippe %A Vermeersch, Bjorn %A Wu, Hao %A Hellings, Geert %A Ryckaert, Julien %A Liu, Changze %B ESSDERC %D 2021 %I IEEE %K dblp %P 55-58 %T Performance Trade-Off Scenarios for GAA Nanosheet FETs Considering Inner-spacers and Epi-induced Stress: Understanding & Mitigating Process Risks. %U http://dblp.uni-trier.de/db/conf/essderc/essderc2021.html#RawatBMVWHRL21 %@ 978-1-6654-3748-6

@inproceedings{conf/essderc/RawatBMVWHRL21, added-at = {2022-10-02T00:00:00.000+0200}, author = {Rawat, Amita and Bhuwalka, Krishna K. and Matagne, Philippe and Vermeersch, Bjorn and Wu, Hao and Hellings, Geert and Ryckaert, Julien and Liu, Changze}, biburl = {https://www.bibsonomy.org/bibtex/20832af523bdae83fd96b3181afe9dc56/dblp}, booktitle = {ESSDERC}, crossref = {conf/essderc/2021}, ee = {https://doi.org/10.1109/ESSDERC53440.2021.9631815}, interhash = {88f34938ae13afc19a32ebbd78baeeee}, intrahash = {0832af523bdae83fd96b3181afe9dc56}, isbn = {978-1-6654-3748-6}, keywords = {dblp}, pages = {55-58}, publisher = {IEEE}, timestamp = {2024-04-09T10:00:03.000+0200}, title = {Performance Trade-Off Scenarios for GAA Nanosheet FETs Considering Inner-spacers and Epi-induced Stress: Understanding & Mitigating Process Risks.}, url = {http://dblp.uni-trier.de/db/conf/essderc/essderc2021.html#RawatBMVWHRL21}, year = 2021 }