%0 Conference Paper %1 conf/3dic/FukushimaMOHBLT16 %A Fukushima, Takafumi %A Murugesan, Mariappan %A Ohsaki, Shin %A Hashimoto, Hiroyuki %A Bea, Jichoel %A Lee, Kang Wook %A Tanaka, Tetsu %A Koyanagi, Mitsumasa %B 3DIC %D 2016 %I IEEE %K dblp %P 1-4 %T New concept of TSV formation methodology using Directed Self-Assembly (DSA). %U http://dblp.uni-trier.de/db/conf/3dic/3dic2016.html#FukushimaMOHBLT16 %@ 978-1-5090-1399-9

@inproceedings{conf/3dic/FukushimaMOHBLT16, added-at = {2021-02-16T00:00:00.000+0100}, author = {Fukushima, Takafumi and Murugesan, Mariappan and Ohsaki, Shin and Hashimoto, Hiroyuki and Bea, Jichoel and Lee, Kang Wook and Tanaka, Tetsu and Koyanagi, Mitsumasa}, biburl = {https://www.bibsonomy.org/bibtex/2e04f5c2dc7784b021ad0d81986fcfba7/dblp}, booktitle = {3DIC}, crossref = {conf/3dic/2016}, ee = {https://doi.org/10.1109/3DIC.2016.7970022}, interhash = {941df7ade66e5ee8e2adce0439f1ae01}, intrahash = {e04f5c2dc7784b021ad0d81986fcfba7}, isbn = {978-1-5090-1399-9}, keywords = {dblp}, pages = {1-4}, publisher = {IEEE}, timestamp = {2024-04-10T12:11:01.000+0200}, title = {New concept of TSV formation methodology using Directed Self-Assembly (DSA).}, url = {http://dblp.uni-trier.de/db/conf/3dic/3dic2016.html#FukushimaMOHBLT16}, year = 2016 }