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A Comparative Evaluation of Deep Learning Anomaly Detection Techniques on Semiconductor Multivariate Time Series Data., , , и . CASE, стр. 1613-1620. IEEE, (2021)Detection & isolation of sensor and actuator additive faults in a 4-mecanum wheeled mobile robot (4-MWMR)., , , , и . ICCAD, стр. 1-6. IEEE, (2019)1D ResNet for Fault Detection and Classification on Sensor Data in Semiconductor Manufacturing., , , , , и . ICCAD, стр. 1-6. IEEE, (2022)On fault detection and isolation applied on unicycle mobile robot sensors and actuators., , , , и . ICSC, стр. 148-153. IEEE, (2018)Monitoring of a sampled process data under Run-to-Run control: application to a semiconductor process., , , , и . CASE, стр. 930-935. IEEE, (2019)Actuator Health State Monitoring & Degradation Impact Study on a 4-Mecanum Wheeled Mobile Robot Behaviour., , , , и . MED, стр. 1076-1081. IEEE, (2021)Run To Run control based on categorical output in semiconductor manufacturing., , , и . ICSC, стр. 180-185. IEEE, (2016)A Bayesian indicator for Run-to-Run Performance Assessment using Industrail Risk., , , , и . WSC, стр. 3592-3602. IEEE, (2018)Self-tuning of dEWMA controller parameters for mixed product processes with equipment aging., , , и . MED, стр. 1373-1378. IEEE, (2016)Fault Detection on Variable Length Multivariate Time Series from Semiconductor Manufacturing., , , и . SENSORS, стр. 1-4. IEEE, (2023)