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Monitoring of a sampled process data under Run-to-Run control: application to a semiconductor process.

, , , , and . CASE, page 930-935. IEEE, (2019)

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Evaluation of Alarm System Performance and Management in Semiconductor Manufacturing., , , , and . CoDIT, page 1155-1160. IEEE, (2019)Translation-Invariant Multiscale Energy-Based PCA for Monitoring Batch Processes in Semiconductor Manufacturing., , , and . IEEE Trans Autom. Sci. Eng., 14 (2): 894-904 (2017)Constructing DEVS models based on experts' knowledge: application to STMicroelectronics' large scale manufacturing processes., , and . SpringSim (TMS-DEVS), page 193-198. SCS/ACM, (2011)Application of Principal Components Analysis to improve fault detection and diagnosis on semiconductor manufacturing equipment., , and . ECC, page 1445-1450. IEEE, (2013)From Alarm System Events Towards Quality Inspection of The Final Product: Application to a Semiconductor Industry., , , , and . ECC, page 1768-1773. IEEE, (2021)A smart sampling scheduling and skipping simulator and its evaluation on real data sets., , , , , and . WSC, page 1908-1917. IEEE, (2011)Run-to-Run sensor variation monitoring for process fault diagnosis in semiconductor manufacturing., , and . WSC, page 2523-2534. IEEE, (2016)Regularized regression models to predict the product quality in multistep manufacturing., , , and . ICSC, page 31-36. IEEE, (2016)Monitoring of a sampled process data under Run-to-Run control: application to a semiconductor process., , , , and . CASE, page 930-935. IEEE, (2019)Product quality prediction using alarm data : Application to the semiconductor manufacturing process., , , , and . MED, page 1332-1338. IEEE, (2017)