Author of the publication

Scheduling of single-arm cluster tools with multi-type wafers and shared PMs.

, , , and . CASE, page 1046-1051. IEEE, (2017)

Please choose a person to relate this publication to

To differ between persons with the same name, the academic degree and the title of an important publication will be displayed. You can also use the button next to the name to display some publications already assigned to the person.

 

Other publications of authors with the same name

Scheduling Cluster Tools in Semiconductor Manufacturing: Recent Advances and Challenges., , , and . IEEE Trans Autom. Sci. Eng., 15 (2): 586-601 (2018)Modeling and scheduling of cluster tools dealing with wafer revisiting: A brief review., , , and . ICNSC, page 271-276. IEEE, (2015)Scheduling dual-arm cluster tools with multiple wafer types and residency time constraints., , , , and . IEEE CAA J. Autom. Sinica, 7 (3): 776-789 (2020)Design Optimization of Support Structures Based on Numerical Simulation of the Temperature Fields in Selective Laser Melting., , and . ICNSC, page 1-5. IEEE, (2021)Parallel Petri Nets Modeling Method Of Manufacturing System Based On The improved PDDL., , , , and . ICNSC, page 1-6. IEEE, (2022)Noise Reduction Study of Signal Detection in Hall Sensors by Modal Analysis., , , , and . ICNSC, page 1-6. IEEE, (2022)Schedulability analysis for dual-armed cluster tools with mixed-processing of multi-variety wafers., , and . ICNSC, page 501-506. IEEE, (2017)Response Policies to Process Module Failure in Single-Arm Cluster Tools Subject to Wafer Residency Time Constraints., , , and . IEEE Trans Autom. Sci. Eng., 12 (3): 1125-1139 (2015)A novel failure response policy for single-arm cluster tools with residency time constraints., , , and . SMC, page 120-126. IEEE, (2014)Transient Process Optimization for Dual-Arm Cluster Tools With Wafer Revisiting., , , and . IEEE Access, (2021)