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A secure collaborative e-diagnostics framework for semiconductor factories.

, , , , , and . CASE, page 185-190. IEEE, (2005)

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A secure collaborative e-diagnostics framework for semiconductor factories., , , , , and . CASE, page 185-190. IEEE, (2005)Implementation Considerations of Various Virtual Metrology Algorithms., , , and . CASE, page 276-281. IEEE, (2007)Preliminary study of an intelligent sampling decision scheme for the AVM system., , , and . ICRA, page 3496-3501. IEEE, (2014)Development of a dual-stage virtual metrology architecture for TFT-LCD manufacturing., , , and . ICRA, page 3630-3635. IEEE, (2008)Application Cluster Service Scheme for Near-Zero-Downtime Services., , , , and . ICRA, page 4062-4067. IEEE, (2005)A Virtual Metrology Scheme for Predicting CVD Thickness in Semiconductor Manufacturing., , , and . ICRA, page 1054-1059. IEEE, (2006)Multivariate Simulation Assessment for Virtual Metrology., , and . ICRA, page 1048-1053. IEEE, (2006)Window-shaped obstacle avoidance for a redundant manipulator., , and . IEEE Trans. Syst. Man Cybern. Part B, 28 (6): 806-815 (1998)Modeling and analysis of equipment managers in manufacturing execution systems for semiconductor packaging., , , , and . IEEE Trans. Syst. Man Cybern. Part B, 30 (5): 772-782 (2000)Development of a system framework for the computer-integrated manufacturing execution system: a distributed object-oriented approach., , , and . Int. J. Computer Integrated Manufacturing, 12 (5): 384-402 (1999)